Journal of Advanced Materials in Engineering (Esteghlal)

In this research titanium nitride (TiN) films were prepared by plasma assisted chemical vapor deposition using TiCl₄, H₂, N₂ and Ar on the AISI H13 tool steel. Coatings were deposited during different substrate temperatures (460^°C, 480 ^° C  and 510 ^°C). Wear tests were performed in order to study the acting wear mechanisms in the high(400 ^°C) and low (25 ^°C) temperatures by ball on disc method. Coating structure and chemical composition were characterized using scanning electron microscopy, microhardness and X-ray diffraction. Wear test result was described in ambient temprature according to wear rate. It was evidenced that the TiN coating deposited at 460 ^°C has the least weight loss with the highest hardness value. The best wear resistance was related to the coating with the highest hardness (1800 Vickers). Wear mechanisms were observed to change by changing wear temperatures. The result of wear track indicated that low-temprature wear has surface fatigue but high-temperature wear showed adhesive mechanism.