Showing 2 results for Plasma
A. Sadough - Vanini,
Volume 22, Issue 1 (7-2003)
Abstract
An analysis of the demands of ULSI and GSI technologies shows the necessity of multi-layer devices to reduction of signal transmission delay time. This reduction is realized by using a better conductor metal, such as Cu and a surrounding insulator with low capacity than actually used, such as Dow Cyclotene 3022. In this paper, the results of evaporated and sputtered Cu to Dow Cyclotene 3022 were studied. After presentation of interfacial reaction that causes adherence, the methods of enhanced adherence as surface modification of polymer by nitrogen plasma have been investigated.
Keywords: Metalization, Cyclotene, Adherence, Plasma, Multi-layer
F. Jafarzadeh, S. Mehrabian,
Volume 41, Issue 1 (9-2022)
Abstract
In this study, a cold atmospheric He plasma jet is investigated. The jet is of dielectric barrier discharge type, consisting of a dielectric tube with two metal ring electrodes. The continuity, momentum and energy conservation equations as well as the Poisson equation for obtaining the potential and the electric field, accompanied with the ideal gas laws, are used for the simulation. The results show that the electron and ion densities, potential and space charge field, internal energy, temperature and velocity of the electrons increase with time. Moreover, the increment of the plasma length and its forward propagation along the jet axis with time is also observed. Therefore, it is expected that the values of the mentioned quantities increase with time, which results in the increment of the plasma jet length.
